Elon Musk may adopt FEL technology to challenge EUV lithography machines.
2 hours ago
SpaceX recently announced a partnership with Tesla, with an initial investment of $16.8 billion to build the Terafab chip facility in Texas, U.S. A blogger reported that based on updates from Terafab, Elon Musk appears to be adopting the "Free Electron Laser (FEL)" technology route to challenge ASML's LPP EUV light source and upend the traditional monopoly of EUV chip production technology. Musk's subsequent response seemingly confirmed this claim, as he posted the phrase "FEL FTW" (FEL For The Win). Judging from Terafab's slender factory design and Musk's reply, the facility will likely use FEL technology. While Musk's push for FEL is still a conjecture, it has sparked heated discussions among industry insiders. FEL boasts advantages such as high power, high coherence, tunable wavelength, and higher energy efficiency; theoretically, it can push lithography light sources from 13.5nm to 6nm or even shorter wavelengths. However, the massive accelerator system, cost, and mass production stability remain the biggest challenges for its industrialization. (Sing Tao News)
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